基于中红外量子级联激光器的SO2 和SO3
检测研究

大气与环境光学学报 ›› 2021, Vol. 16 ›› Issue (5): 424-431.

基于中红外量子级联激光器的SO2 和SO3 检测研究

刘强强, 朱宏历, 郭古青, 王泽育, 冯仕凌, 邱选兵, 何秋生, 李传亮∗

太原科技大学应用科学学院物理系, 山西太原 030024

收稿日期:2021-04-07 修回日期:2021-06-16 出版日期:2021-09-28 发布日期:2021-09-28
通讯作者: E-mail: clli@tyust.edu.cn E-mail:E-mail: clli@tyust.edu.cn
作者简介:刘强强 (1995 - ), 山西临汾人, 硕士研究生, 主要从事光电探测技术及应用的研究。 E-mail: qiang.spectra@qq.com
基金资助:
Supported by National Natural Science Foundation of China (国家自然科学基金, U1810129, 52076145, 11904252), Transformation of Scientific and Technological Achievements Fund of Shanxi Province (山西省科技成果转化引导专项项目, 201904D131025), State Key Laboratory of Applied Optics (应用光学国家重点实验室开放基金, SKLAO-201902)

Simultaneous Detection of SO2 and SO3 Based on Mid-IR Quantum Cascade Laser System

LIU Qiangqiang, ZHU Hongli, GUO Guqing, WANG Zeyu, FENG Shiling, QIU Xuanbing, HE QiuSheng, LI Chuanliang∗

Department of Physics, School of Applied Science, Taiyuan University of Science and Technology, Taiyuan 030024, China

Received:2021-04-07 Revised:2021-06-16 Published:2021-09-28 Online:2021-09-28

摘要/Abstract

摘要： 二氧化硫 (SO2) 和三氧化硫 (SO3) 是工业废气排放中的重要物质, 对环境和人体健康危害很大, 但对于他们在排放过程中的原位-在线测量一直是个挑战。采用可调谐二极管激光吸收光谱 (TDLAS) 技术, 基于 7.16 µm 量子级联激光器 (QCL) 对 SO2 和 SO3 进行同时检测, 通过波长调制光谱技术提高测量系统的灵敏度和鲁棒性。在高温低压条件下采用单光程-小体积的气体吸收池利用 TDLAS 同时测量 SO2 和 SO3 的吸收谱线, 测量的 SO2 和 SO3 的吸收光谱充分分离, 从而确保了测量的准确性。同时, 修正了温度变化对 SO2 气体浓度测量的影响, 并提出了用已知浓度的 SO2 来定标未知浓度的 SO3 气体。 Allan 方差分析表明, 在 34 s 的积分时间内, SO2 的最小检测限达到了1.98×10−6 cm3·cm−3, SO3 可探测的最低浓度为 1.575 ×10−6 cm3·cm−3。系统的上升响应时间约为 16 s, 下降响应时间约为 18 s。

关键词: 二氧化硫, 三氧化硫, 可调谐二极管激光吸收光谱技术, 量子级联激光器

Abstract: Sulfur dioxide (SO2) and sulfur trioxide (SO3) are important substances in waste gas emission, and do great harm to both the environment and human′s health. However, in-situ and real-time measurement of SO2 and SO3 in the process of emissions has always been a challenge. Herein, tunable diode laser absorption spectroscopy (TDLAS) technology is presented to determine the mass of SO2 and SO3 simultaneously using a quantum cascade laser emitting at 7.16 µm, and the sensitivity and robustness of the measurement system is improved by employing wavelength modulation spectroscopy. In this work, a simple single-pass gas cell with low-volume is used at high temperature and low pressure to ensure the spectra of SO2 and SO3 can be separated completely when measured simultaneously. Therefore, the concentration measurement of both SO2 and SO3 are reliable, since their spectral lines are not affected by spectral overlapping due to broadening. In addition, the influence of temperature on SO2 concentration measurement is corrected, and it is proposed to calibrate the concentration of SO3 with the standard concentration SO2 gas. According to the Allan deviation analysis, the minimum detection limit for SO2 can reach 1.98×10−6 cm3·cm−3 with the integration time of 34 s, and that of SO3 is estimated as 1.575×10−6 cm3·cm−3. The rise time and the fall time of the system are rapid as 16 s and 18 s, respectively.

Key words: SO2, SO3, tunable diode laser absorption spectroscopy, quantum cascade laser

中图分类号:

刘强强, 朱宏历, 郭古青, 王泽育, 冯仕凌, 邱选兵, 何秋生, 李传亮∗. 基于中红外量子级联激光器的SO2 和SO3 检测研究[J]. 大气与环境光学学报, 2021, 16(5): 424-431.

LIU Qiangqiang, ZHU Hongli, GUO Guqing, WANG Zeyu, FENG Shiling, QIU Xuanbing, HE QiuSheng, LI Chuanliang∗. Simultaneous Detection of SO2 and SO3 Based on Mid-IR Quantum Cascade Laser System[J]. Journal of Atmospheric and Environmental Optics, 2021, 16(5): 424-431.

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