基于双端固定梁与曲面电极的异面微致动器静态特性

马洪锋鄢波魏高尧隋成华

Static Characteristics of Out-of-Plane Actuators with Curved Electrode and Clamped-Clamped Beam

MA Hong-Feng, YAN Bo, WEI Gao-Yao, SUI Cheng-Hua

大气与环境光学学报 . 2014, (4): 323 -328 .