基于共振型光声光谱技术的痕量二氧化碳气体传感系统

doi:10.3969/j.issn.1673-6141.2025.02.005

大气与环境光学学报 ›› 2025, Vol. 20 ›› Issue (2): 168-175.doi: 10.3969/j.issn.1673-6141.2025.02.005

• 环境光学监测技术 • 上一篇

基于共振型光声光谱技术的痕量二氧化碳气体传感系统

杨子健 1, 李琳 1, 郭古青 1, 宫廷 1, 刘强 2, 田亚莉 1, 孙小聪 1, 邱选兵 1, 李传亮 1*

1 太原科技大学应用科学学院, 山西省精密测量与在线检测装备工程研究中心, 山西太原 030024; 2 中国科学院合肥物质科学研究院安徽光学精密机械研究所, 中国科学院大气光学重点实验室, 安徽合肥 230031

收稿日期:2022-09-26 修回日期:2022-10-23 出版日期:2025-03-28 发布日期:2025-03-24
通讯作者: E-mail: clli@tyust.edu.cn E-mail:li_chuanliang@126.com
作者简介:杨子健 (1996- ), 河北邯郸人, 硕士研究生, 主要从事激光光谱与应用方面的研究。E-mail: zijianyang96@126.com
基金资助:
国家重点研发计划 (2023YFF0718100), 国家自然科学基金 (62475182), 山西省科技创新人才团队专项资助 (202304051001034), 山西省重点研发计划 (202302150101006), 江淮前沿技术协同创新中心追梦基金课题 (2023-ZM01C002), 山西省科研实践创新类项目 (2023KY667)

Trace carbon dioxide gas sensor based on resonance photoacoustic spectroscopy

YANG Zijian 1, LI Lin 1, GUO Guqing 1, GONG Ting 1, LIU Qiang 2, TIAN Yali 1,#br# SUN Xiaocong 1, QIU Xuanbing 1, LI Chuanliang 1*#br#

1 Shanxi Engineering Research Center of Precision Measurement and Online Detection Equipment and School of Applied Science, Taiyuan University of Science and Technology, Taiyuan 030024, China; 2 Key Laboratory of Atmospheric Optics, Anhui Institute of Optics and Fine Mechanics, HFIPS, Chinese Academy of Sciences, Hefei 230031, China

Received:2022-09-26 Revised:2022-10-23 Online:2025-03-28 Published:2025-03-24

摘要/Abstract

摘要： 基于1.578 μm的分布式反馈半导体激光器搭建了一套用于二氧化碳 (CO2) 检测的共振型光声光谱测量系统。该系统采用800 Hz最佳调制频率对激光器波长进行调制，同时采用1 Hz的锯齿波对激光波长进行调谐。为了提高光声信号的强度，设计了用于光声检测的Herriott 型多光程池，该光程池最大反射次数可达42 次，对应光程约为8.4 m，测量结果表明通过多次反射将光声信号提升了11.5 倍，从而提高了系统的检测灵敏度。通过估算196.42 mg/m3的CO2 光声信号信噪比得出系统极限检测灵敏度为7.26 mg/m3。进一步利用卡尔曼滤波算法对连续采集的光声信号进行优化，提高了系统的鲁棒性，检测精度提升了1.36 倍。利用该系统对982.14 mg/m3标准CO2气体进行了10 h 的连续检测，测量的质量浓度起伏小于1.7%，验证了该传感器系统的准确性和可靠性。本工作为近红外激光器实现CO2以及其他痕量气体的实时测量提供了一种有效方法。

关键词: 光声光谱, 二氧化碳, 多光程池, 波长调制

Abstract: Based on a 1.578 μm distributed feedback semiconductor laser, a resonant photoacoustic spectroscopy measurement system for carbon dioxide (CO2) detection is built in this work. In the system, the wavelength is modulated using the optimal frequency of 800 Hz and tuned using sawtooth wave with the value of 1 Hz. In order to improve the intensity of photoacoustic signal, a Herriott type multi optical path cell for photoacoustic detection is designed with the maximum reflection number of 42 times and the corresponding optical path of 8.4 m. The experimental results show that the photoacoustic signal is increased by 11.5 times by multiple reflections, which improves the detection sensitivity of the system. By estimating the signal-to-noise ratio of 196.42 mg/m3 CO2 photoacoustic signal, the limit detection sensitivity of the system is obtained to be 7.26 mg/m3. Further, the Kalman filtering algorithm is used to optimize the continuous acquisition of photoacoustic signals, which improves the robustness of the system, and the detection accuracy of the system is improved by 1.36 times. The system is used to continuously monitor 982.14 mg/m3 standard CO2 gas for 10 hours, and the fluctuation of the measured mass concentration is less than 1.7%, which verifies the accuracy and reliability of the developed CO2 sensor system. This work provides an effective method for real-time measurement of CO2 and other trace gases by near-infrared laser.

Key words: photoacoustic spectroscopy, carbon dioxide, multipass cell, wavelength modulation

中图分类号:

O433.1

杨子健, 李琳, 郭古青, 宫廷, 刘强, 田亚莉, 孙小聪, 邱选兵, 李传亮 . 基于共振型光声光谱技术的痕量二氧化碳气体传感系统[J]. 大气与环境光学学报, 2025, 20(2): 168-175.

YANG Zijian , LI Lin , GUO Guqing , GONG Ting , LIU Qiang , TIAN Yali , SUN Xiaocong , QIU Xuanbing , LI Chuanliang . Trace carbon dioxide gas sensor based on resonance photoacoustic spectroscopy[J]. Journal of Atmospheric and Environmental Optics, 2025, 20(2): 168-175.

参考文献

[1]XIN F, YANG D, LI C, et al.Detection of CO2 concentration using a fiber-optic cantilever acoustic sensor in 2.0-μm band [M]. International Conference on Optoelectronic and Microelectronic Technology and Application. 2020, (1161722). [2]LEWICKI R, WYSOCKI G, KOSTEREV A A, et al.Carbon dioxide and ammonia detection using 2μm diode laser based quartz-enhanced photoacoustic spectroscopy [J].Applied Physics B, 2006, 87(1):157-62 [3]WANG Z, WANG Q, CHING J Y-L, et al.A portable low-power QEPAS-based CO2 isotope sensor using a fiber-coupled interband cascade laser. [J].Sensors and Actuators B: Chemical, 2017, 246:710-715 [4]QIAO S, QU Y, MA Y, et al.A Sensitive Carbon Dioxide Sensor Based on Photoacoustic Spectroscopy with a Fixed Wavelength Quantum Cascade Laser. [J].Sensors (Basel), 2019, 19(19):4187-4187 [5]DAVIS W J.The Relationship between Atmospheric Carbon Dioxide Concentration and Global Temper-ature for the Last 425 Million Years. [J].Climate, 2017, 5(4):76-77 [6]LI W, ZHANG F, PAN L, et al.Gas or electricity? Regional pathway selection under carbon neutrality target: A case study of industrial boilers. [J].Journal of Cleaner Production, 2022, 349:131313-131313 [7]ZAMPOLLI S, ELMI I, STüRMANN J, et al.Selectivity enhancement of metal oxide gas sensors using a micromachined gas chromatographic column [J].Sensors and Actuators B: Chemical, 2005, 105(2):400-6 [8]SUN Y, LIU Q, ZHA S, et al.Sub‐ppb nitrogen dioxide detection based on resonant photoacoustic spec-troscopy [J].Microwave and Optical Technology Letters, 2021, 63(8):2058-62 [9]ZHU Y, SHI J, ZHANG Z, et al.Development of a gas sensor utilizing chemiluminescence on nanosized titanium dioxide [J].Analytical chemistry, 2002, 74(1):120-4 [10]ZHANG Z, ZHANG C, ZHANG X.Development of a chemiluminescence ethanol sensor based on na-nosized ZrO2 [J].The Analyst, 2002, 127(6):792-6 [11]BAHRINI C, HERBINET O, GLAUDE P-A, et al.Detection of some stable species during the oxidation of methane by coupling a jet-stirred reactor (JSR) to cw-CRDS. [J].Chemical Physics Letters, 2012, 534:1-7 [12]MCHALE L E, MARTINEZ B, MILLER T W, et al.Open-path cavity ring-down methane sensor for mobile monitoring of natural gas emissions [J].Opt Express, 2019, 27(14):20084-97 [13]JIANG J, ZHAO M, MA G M, et al.TDLAS-Based Detection of Dissolved Methane in Power Transformer Oil and Field Application [J].IEEE Sensors Journal, 2018, 18(6):2318-25 [14]DONG L, TITTEL F K, LI C, et al.Compact TDLAS based sensor design using interband cascade lasers for mid-IR trace gas sensing [J].Opt Express, 2016, 24(6):A528-35 [15]KOSKINEN V, FONSEN J, ROTH K, et al.Cantilever enhanced photoacoustic detection of carbon dioxide using a tunable diode laser source [J].Applied Physics B, 2007, 86(3):451-4 [16]HANYECZ V, MOHáCSI á, POGáNY A, et al.Multi-component photoacoustic gas analyzer for industrial applications [J].Vibrational Spectroscopy, 2010, 52(1):63-8 [17]REED Z D, SPERLING B, VAN ZEE R D, et al.Photoacoustic spectrometer for accurate,continuous measurements of atmospheric carbon dioxide concentration [J].Applied Physics B, 2014, 117(2):645-57 [18]DONG L, WU H, ZHENG H, et al.Double acoustic microresonator quartz-enhanced photoacoustic spectroscopy [J].Opt Lett, 2014, 39(8):2479-82 [19]LIU K, MEI J, ZHANG W, et al.Multi-resonator photoacoustic spectroscopy [J].Sensors and Actuators B: Chemical, 2017, 251:632-636 [20]LIU T, JIANG S, LANDGRAF R, et al.A photocoustic spectroscopy system for gas detection based on the multi-pass cell [M]. Advanced Sensor Systems and Applications VII. 2016. [21]YANG T, CHEN W, WANG P.A review of all-optical photoacoustic spectroscopy as a gas sensing method [J].Applied Spectroscopy Reviews, 2020, 56(2):143-70 [22]ZHA S, MA H, ZHA C, et al.Trace gas detection based on photoacoustic spectroscopy in 3-D printed gas cell [J].Journal of Near Infrared Spectroscopy, 2020, 28(4):236-42 [23]MA Y, QIAO S, HE Y, et al.Highly sensitive acetylene detection based on multi-pass ret-ro-reflection-cavity-enhanced photoacoustic spectroscopy and a fiber amplified diode laser [J].Opt Ex-press, 2019, 27(10):14163-72 [24]Peng Y, Yu Q X.Photoacoustic spectral detection of C2H2 gas based on tunable fiber laser [J].Spectroscopy and Spectral Analysis, 2009, 29(08):2030-3 [25]彭勇，于清旭.基于可调谐光纤激光器的气体光声光谱检测 [J].光谱学与光谱分析, 2009, 29(08):2030-3 [26]Lv W J, Li H L, Li W D, et al.Optimization and experimental research on modulation parameters of TDLAS technology [J].Laser Technology, 2021, 45(03):336-43 [27]吕文静，李红莲，李文铎，等.技术调制参量的优化及实验研究 [J].激光技术, 2021, 45(03):336-43 [28]LELEUX D P, CLAPS R, CHEN W, et al.Applications of Kalman filtering to real-time trace gas concen-tration measurements [J].Appl Phys B, 2002, 74(1):85-93

编辑推荐 0

Metrics

阅读次数

全文

HTML			PDF

最新录用	在线预览	正式出版	最新录用	在线预览	正式出版
0	0	0	0	0	19

	来源	本网站

	次数	19
	比例	100%

摘要

最新录用	在线预览	正式出版

0	0	26

	来源	本网站

	次数	26
	比例	100%

基于共振型光声光谱技术的痕量二氧化碳气体传感系统

Trace carbon dioxide gas sensor based on resonance photoacoustic spectroscopy

PDF (PC)

可视化

摘要/Abstract

引用本文

使用本文

参考文献

相关文章 12

编辑推荐 0

Metrics

本文评价

[1]	李仁仕, 邓昊, 阚瑞峰, 杨晨光, 刘浩, 许振宇, 张先燚 . 基于近红外激光外差光谱的大气CO2廓线反演方法研究[J]. 大气与环境光学学报, 2025, 20(2): 158-167.
[2]	孙柳雅, 牛明生, 陈加雪, 唐敏, 尹亚婕, 欧阳金华. 基于宽带光源的光声传感器用于氨气探测[J]. 大气与环境光学学报, 2024, 19(5): 580-588.
[3]	杨旭刘霖李金义杜振辉张哲远. 基于中红外DFB-ICL的氨气传感器设计[J]. 大气与环境光学学报, 2017, 12(6): 411-419.
[4]	王雪梅刘石. 基于波长调制光谱技术的二氧化碳浓度测量[J]. 大气与环境光学学报, 2017, 12(5): 356-361.
[5]	信丰鑫郭金家孙加运马玲李杰夏晖晖刘继桥刘智深. 基于可调谐半导体激光吸收光谱技术对开放式长光程大气CO2的测量[J]. 大气与环境光学学报, 2017, 12(4): 269-275.
[6]	武红鹏,董磊,郑华丹,刘研研,刘小利,尹旭坤,马维光,张雷,尹王保,贾锁堂. 双通道石英增强光声光谱测声器的设计及实验研究[J]. 大气与环境光学学报, 2016, 11(1): 37-43.
[7]	尹旭坤董磊马维光张雷尹王保贾锁堂. 石英增强光声光谱技术的研究进展[J]. 大气与环境光学学报, 2015, 10(3): 197-204.
[8]	刘丽丽赖倍贤王尹秀贾兆丽陈东. 基于谐波的红外激光调制光谱特性研究[J]. 大气与环境光学学报, 2014, 9(3): 210-214.
[9]	董磊武红鹏张翔马维光张雷尹王保贾锁堂. 石英增强光声光谱在氢气纯度分析中的应用[J]. 大气与环境光学学报, 2012, (6): 421-426.
[10]	叶函函王先华吴军方勇华熊伟崔方晓. 二氧化碳浓度高精度反演的敏感性研究[J]. 大气与环境光学学报, 2011, 6(3): 208-214.
[11]	胡振华方芳顾学军方黎. 红外辐射光谱反演CO2浓度的敏感性研究[J]. 大气与环境光学学报, 2010, 5(4): 269-275.
[12]	胡顺星赵培涛汪少林曹开法方欣范广强王敏赵博胡欢陵王英俭. ARL-1 Raman激光雷达系统探测大气二氧化碳[J]. 大气与环境光学学报, 2009, 4(6): 401-405.