狭缝宽度的衍射法测量研究

大气与环境光学学报 ›› 2010, Vol. 5 ›› Issue (5): 380-389.

狭缝宽度的衍射法测量研究

何波,郑小兵,李新，戚涛，邹鹏

（中国科学院安徽光学精密机械研究所中国科学院通用光学辐射定标与表征技术创新重点实验室，安徽合肥 230031）

收稿日期:2010-04-08 修回日期:2010-05-04 出版日期:2010-09-28 发布日期:2010-09-14
通讯作者: 何波 (1981-)，男，安徽人，研究生,主要从事光电探测及精密测量方面的研究。 E-mail:herbird@sina.com
作者简介:何波 (1981-)，男，安徽人，研究生,主要从事光电探测及精密测量方面的研究。
基金资助:
国家863计划（2007AA12Z106）、安徽省自然科学基金（090412042）资助

Investigation of Diffraction Method for Slit Width Measurement

HE Bo, ZHENG Xiao-bing, LI Xin, QI Tao, ZOU Peng

（Key Laboratory of General Optical Calibration and Characterization, Anhui Institute of Optics and Fine Mechanics, Chinese Academy of Sciences ，Hefei 230031, China)

Received:2010-04-08 Revised:2010-05-04 Published:2010-09-28 Online:2010-09-14

摘要/Abstract

摘要：

针对太阳绝对光谱辐照度仪研制过程中入射狭缝光阑高精度测量的实际需求，研制了基于激光衍射的狭缝宽度检测系统。该系统以激光作为光源，使用NMOS线列探测器作为检测传感器、以混合信号单片机C8051F为主控处理器，结合CPLD作为时序发生器和片上12位模数转换器，并采用最小二乘法对测量数据进行拟合提取条纹中心位置，实现了狭缝的高精度检测。系统可检测狭缝范围为0.02-0.5 mm，并在对太阳绝对光谱辐照度仪中标称为0.1 mm的狭缝测量中获得了3.25?10-3 µm测量不确定度。

关键词: 狭缝测量, NMOS线列探测器, 光电检测系统, 最小二乘法

Abstract:

A diffraction-based opto-electronic system is developed for precise measurement of entrance slit width of solar irradiance radiometer. The system uses laser as light source, a NMOS linear array as opto-electronic sensor, a mixed-signal MCU C8051F as host controller, a CPLD as timing generator and on-chip 12-bit ADC. In addition, to achieve high-precision measurement, it uses least-squares method fitting the measured data to extract strip center location. Slit width can be measured within the range from 0.02 mm to 0.5 mm，in the measurement of entrance width of solar irradiance radiometer whose nominal width is 0.1 mm , the total uncertainty is 2.5× 10-3 µm.

Key words: slit width measurement, NMOS linear image senor, opto-electronic system, least-square

中图分类号:

TN247

何波郑小兵李新戚涛邹鹏. 狭缝宽度的衍射法测量研究[J]. 大气与环境光学学报, 2010, 5(5): 380-389.

HE Bo, ZHENG Xiao-Bing, LI Xin, QI Tao, ZOU Peng. Investigation of Diffraction Method for Slit Width Measurement[J]. Journal of Atmospheric and Environmental Optics, 2010, 5(5): 380-389.

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