基于ISO10110-5的面形评价参数研究

大气与环境光学学报 ›› 2012, Vol. ›› Issue (4): 303-.

基于ISO10110-5的面形评价参数研究

赵兵1, 王伟2, 陈磊3

(1解放军理工大学通信工程学院, 江苏南京, 210007;
2江苏有线南京分公司播控中心, 江苏南京, 210001;
3南京理工大学电光学院, 江苏南京, 210094)

收稿日期:2011-10-24 修回日期:2012-03-16 出版日期:2012-07-28 发布日期:2012-07-19
通讯作者: 赵兵 (1984-)，女，河南郑州人，硕士，主要从事光电检测及光通信技术方面的教学与研究。 E-mail:535699283@qq.com
作者简介:赵兵 (1984-)，女，河南郑州人，硕士，主要从事光电检测及光通信技术方面的教学与研究。

Investigation of Surface Form Evaluation Based on ISO10110-5

ZHAO Bing 1, WANG Wei 2, CHEN Lei 3

(1 Institute of Communications Engineering, PLA University of Science and Technology, Nanjing 210007, China;
2 The Broadcast Control Center of Jiangsu Broadcasting Cable Information Network Corporation Limited, Nanjing 210001, China;
3 School of Electronic Engineering and Optoelectronic Technology, Nanjing University of Science and Technology, Nanjing 210094, China)

Received:2011-10-24 Revised:2012-03-16 Published:2012-07-28 Online:2012-07-19

摘要/Abstract

摘要：

现在国外商用ZYGO干涉仪可提供一些基于ISO10110-5的面形评价参数，而国内的自制干涉仪还没有这项功能。IS010110-5中提出这些面形评价参数的计算可以通过波面分解的方法实现。运用Gram-Schmidt最小二乘法拟合得到Zernike多项式系数，再从包含被测信息的原始波面中依次减去各种表面面形偏差，就可实现对这些参数的定量分析。通过与ZYGO干涉仪的输出对比，验证了自编拟合程序所得数据的有效性，而通过波面分解得到的各种干涉图也有益于光学加工者分析偏差原因和器件应用后果。

关键词: ISO10110-5, Zernike多项式, 面形评价, 波面分解

Abstract:

Now the abroad commercial interferometer ZYGO can provide some surface form evaluation coefficients based on ISO10110-5, which the domestic interferometers don't have. These surface form evaluation coefficients can be actualized by the method of wavefront decomposition. Firstly the Zernike polynomial coefficients are achieved by Gram-Schmidt least square method, secondly different surface forms are subtracted from the original wavefront which contains the tested information, and thus the quantitative analysis of these coefficients is realized. Contrast with the output from ZYGO, the validity of the data from the self-compiled code is tested. And the interference patterns from the wavefront decomposition are also helpful to the optical processors to analyze the errors and the application result.

Key words: ISO10110-5, Zernike polynomial, surface form evaluation, wavefront decomposition

中图分类号:

TP274.2

赵兵王伟陈磊. 基于ISO10110-5的面形评价参数研究[J]. 大气与环境光学学报, 2012, (4): 303-.

DIAO Bing, WANG Wei, CHEN Lei. Investigation of Surface Form Evaluation Based on ISO10110-5[J]. Journal of Atmospheric and Environmental Optics, 2012, (4): 303-.

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