基于音圈电机的精密扫描定位设计

大气与环境光学学报 ›› 2014, Vol. 9 ›› Issue (5): 384-390.

基于音圈电机的精密扫描定位设计

刘恩超, 李新, 张艳娜, 徐春风, 郑小兵

（中国科学院安徽光学精密机械研究所中国科学院通用光学定标与表征技术重点实验室，安徽合肥 230031）

收稿日期:2014-03-10 修回日期:2014-07-11 发布日期:2014-09-16
通讯作者: 刘恩超（1985-），男，山东菏泽人，博士，主要从事光辐射定标和野外仪器的设计。 E-mail:liuech@aiofm.ac.cn
作者简介:刘恩超（1985-），男，山东菏泽人，博士，主要从事光辐射定标和野外仪器的设计。
基金资助:
中国科学院科研装备研制项目（YZ201224）资助

Design of Precise Scanning and Positioning Based on Voice-Coil Actuator

LIU En-chao, LI Xin, ZHANG Yan-na, XU Chun-feng, ZHENG Xiao-bing

(Key Laboratory of Optical Calibration and Characterization, AnHui Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Hefei 230031, China)

Received:2014-03-10 Revised:2014-07-11 Online:2014-09-16

摘要/Abstract

摘要：

针对目前精确定位技术在精微操作领域的应用，设计了基于音圈电机的精密扫描定位装置，用于实现光谱扫描测量中的成像光斑的定位。根据不同电机驱动的对比，选择直线型音圈电机作为精密定位的驱动装置。结合不同直线型直流电机的分类，详细叙述了音圈电机的工作原理、参数及选择依据。在结构设计中采用了柔性轴承和悬臂，并对柔性悬臂进行受力分析。结合精确定位及音圈电机的工作需求，设计了专门的驱动装置。通过实验对扫描定位装置进行性能验证，结果显示，定位装置的稳定时间小于30 ms，长时间的偏移小于1.5 μm，满足扫描定位的微米量级的设计要求。

关键词: 音圈电机, 柔性轴承, 精确定位, 性能验证

Abstract:

In order to develop the technology of precise positioning which was applied in the field of micro-operation widely, a precise device of scanning and positioning based on voice-coil actuator was designed and applied on positioning of imaging facula in the measurement of spectra. Based on the contrast of different motor driver, the linear voice-coil actuator was selected as the driving device of precise positioning. According to the classification of different linear DC-motor, the working principle, parameters and the basis of selection of the voice-coil actuator were described. The flexible bearing and cantilever were introduced in the structure design, and the stress analysis of the flexible cantilever was performed. With the demand of precise positioning and the working of voice-coil actuator, the special driving device was designed. The performance validation of the scanning device was adopted. The results show that the stable time of the scanning and positioning device is less than 30 ms and the long time working excursion is less than 1.5 μm, so the design requirements of micro-meter of the device were accomplished.

Key words: voice-coil actuator, flexible bearing, precise position, performance validation

中图分类号:

TM301.2

刘恩超李新张艳娜徐春风郑小兵. 基于音圈电机的精密扫描定位设计[J]. 大气与环境光学学报, 2014, 9(5): 384-390.

LIU En-Chao, LI Xin, ZHANG Yan-Na, XU Chun-Feng, ZHENG Xiao-Bing. Design of Precise Scanning and Positioning Based on Voice-Coil Actuator[J]. Journal of Atmospheric and Environmental Optics, 2014, 9(5): 384-390.

参考文献

[1] Yajima H, Wakiwaka H, Minegishi K, et al. Design of linear DC motor for high-speed positioning [J]. Sensors and Actuators, 2000, 81: 281-284.
[2] Li Y, Horowitz R. Mechatronics of electrostatic microactuators for computer disk drive dual-stage servo systems [J]. Ieee-Asme Transactions on Mechatronics, 2001, 6(2): 111-121.
[3] Yang Shouwang. The Research of Image Scanning Control System of Aerial Camera Based on VCM [D]. Changchun: Doctorial Dissertation of Changchun Institute of Optics, Fine Mechanics and Physics, 2011(in Chinese).
杨守旺. 基于音圈电机驱动的航空相机像面扫描系统研究 [D]. 长春: 长春光学精密机械与物理研究所博士论文 2011.
[4] Liu Enchao, Zheng Xiaobing, Li Xin, et al. Wavelength calibration of absolute irradiance spectra-radiometer [J]. Optics and Precision Engineering, 2013, 21(3): 608-615(in Chinese).
刘恩超, 郑小兵, 李新等. 绝对光谱辐照度仪的波长定标 [J]. 光学精密工程, 2013, 21(3): 608-615.
[5] Zhang Dawei, Feng Xiaomei. The technical principle of voice-coil actuator [J]. Journal of North University of China, 2006, 27(3): 224-228(in Chinese).
张大卫, 冯晓梅. 音圈电机的技术原理 [J]. 中北大学学报, 2006, 27(3): 224-228.
[6] Chang Xuefeng, Chen Youping, Ai Wu, et al. Design and control application of voice coil linear motors [J]. Micromotors, 2008, 41(11): 66-69, 83(in CHinese).
常雪峰, 陈幼平, 艾武, 等. 音圈直线电动机设计、控制及应用综述 [J]. 微电机, 2008, 41(11): 66-69, 83.
[7] Li J, Liu Y, Sun L, et al. Mechanism and control of linear positioning for IC wire bonders [C]. International Conference on Electronic Pakaging Technology, 2005: 171-174.
[8] Reddy R G, DeVor R E, Kapoor S G, et al. A mechanistic model-based force-feedback scheme for voice-coil actuated radial contour turning [J]. International Journal of Machine Tool & Manufacture, 2001, 41: 1131-1147.
[9] Khandaker M F, Hong H. Modeling and controller design for a voice coil actuated engine valve [C]. Proceedings of the 2005 IEEE Conference on Control Applications, 2005: 1234-1239.
[10] BURR-BROWN. High-Voltage, High-current operational amplifier OPA544 [Z]. 1995.
[11] ST. L78xx Positive regulators [Z]. 2008.