MOPA准分子激光同步系统信号发生器的设计

大气与环境光学学报 ›› 2014, Vol. 9 ›› Issue (6): 464-470.

MOPA准分子激光同步系统信号发生器的设计

李皙茹, 钱小东, 鲍健, 梁勖

（中国科学院安徽光学精密机械研究所, 安徽合肥 230031）

发布日期:2014-11-14
通讯作者: 李皙茹（1989-），女，河南郑州人，研究生，主要从事电子与嵌入式系统设计研究。 E-mail:lixiru@mail.ustc.edu.cn
作者简介:李皙茹（1989-），女，河南郑州人，研究生，主要从事电子与嵌入式系统设计研究。
基金资助:
国家科技重大专项项目（2013ZX02202004）资助

Design of MOPA Excimer Laser Synchronization System Signal Generator

LI Xi-ru, QIAN Xiao-dong, BAO Jian, LIANG Xu

( Anhui Institute of Optics and Fine Mechanics, Hefei, 230031, China)

Online:2014-11-14

摘要/Abstract

摘要：

针对MO-PA(振荡-放大)准分子激光器双腔放电同步系统，设计了基于PIC16F873A单片机和直接数字式频率合成器 (direct digital synthesizer, DDS)芯片AD9833的方波信号发生器。对比传统简易信号发生器的优缺点，结合应用在激光器工作的实际环境，讨论了系统的硬件结构以及实现的软件流程，经过实验及分析，结果表明在1～4 kHz范围内，信号发生电路输出方波信号频率误差<0.05 Hz。

关键词: 准分子激光, 同步, 信号发生器

Abstract:

For MO-PA (master-oscillator power amplifier) excimer laser dual-chamber discharge synchronous system, a square wave signal generator based on PIC16F873A microcontroller and DDS (direct digital synthesizer, direct digital frequency synthesizer) chip AD9833 is designed. Comparing to advantages and disadvantages of the traditional simple signal generator and considering application environment of laser operating, the hardware structure of the system and the software process to achieve were discussed. Through experiments and analysis, the results show that the output signal circuit can generate high quality square wave ranging within 1～4 kHz and the frequency error is less than 0.05 Hz.

Key words: excimer laser, synchronization, signal generator

中图分类号:

TP23

李皙茹钱小东鲍健梁勖. MOPA准分子激光同步系统信号发生器的设计[J]. 大气与环境光学学报, 2014, 9(6): 464-470.

LI Xi-Ru, QIAN Xiao-Dong, BAO Jian, LIANG Xu. Design of MOPA Excimer Laser Synchronization System Signal Generator[J]. Journal of Atmospheric and Environmental Optics, 2014, 9(6): 464-470.

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