双通道石英增强光声光谱测声器的设计及实验研究

大气与环境光学学报 ›› 2016, Vol. 11 ›› Issue (1): 37-43.

双通道石英增强光声光谱测声器的设计及实验研究

武红鹏, 董磊*, 郑华丹, 刘研研, 刘小利, 尹旭坤, 马维光, 张雷, 尹王保, 贾锁堂

（山西大学激光光谱研究所，量子光学与光量子器件国家重点实验室，太原 030006）

收稿日期:2014-09-18 修回日期:2014-12-19 出版日期:2016-01-28 发布日期:2016-01-28
通讯作者: 董磊（1979- ），男，副教授，河南省新乡市人，主要从事激光光谱技术及气体传感器的研究。 E-mail:donglei@sxu.edu.cn
作者简介:武红鹏（1986-），男，山西省文水县人，博士研究生，主要从事激光光谱技术及气体传感器的研究。
基金资助:
国家青年基金(61108030)、国家自然科学基金(61275213)、山西省青年基金（2013021004-1）、山西省回国留学人员科研项目（2013-011）、山西省人事厅项目（201301）资助

Design and Experimental Research on Two Channel Quartz-Enhanced Photoacoustic Spectroscopy Spectrophone

WU Hongpeng, DONG Lei*, ZHENG Huadan, LIU Yanyan, LIU Xiaoli, YIN Xukun, MA Weiguang, ZHANG Lei, YIN Wangbao, JIA Suotang

(Institute of Laser Spectroscopy of Shanxi University, State Key Laboratory of Quantum Optics and Quantum Optics Devices, Taiyuan 030006, China)

Received:2014-09-18 Revised:2014-12-19 Published:2016-01-28 Online:2016-01-28

摘要/Abstract

摘要：

设计了一款拥有双谐振腔的新型石英增强光声光谱测声器。通过开展多气体浓度的快速测量实验，研究了系统的灵敏度及可靠性。实验结果显示该种新颖的谐振腔结构并未引入新的噪声。双谐振腔的设计大大增强了石英音叉与谐振腔之间的声耦合强度，这一强耦合使传感器的响应时间下降至约5 ms，且上下两通道单独工作时的归一化噪声等效吸收系数分别达到7.8*10-9 cm-1W/√Hz和8.1*10-9 cm-1W/√Hz。另外，这一配置提供了两个相互独立的气体检测通道，为不同波长特别是波长间隔较大的两路激光光信号的相加或相消提供了一种可行性方案，也必将对多组分混合气体的快速在线检测的发展起到极大的推动作用。

关键词: 石英音叉, 光声光谱, 双微型谐振腔, 响应时间, 气体传感器

Abstract:

Acoustic detection sensor system based on quartz-enhanced photoacoustic spectroscopy (QEPAS) with double acousticmicro-resonators (AmR) is developed. The experiment for detection of H2O and CO2 was carried out to evaluate the sensitivity and stability of the system. The results show that the noise characteristics of the double AmR configuration still agree with the single AmR configuration. The double AmRs spectrophone configuration exhibits a strong acoustic coupling between the AmRs and the quartz tuning fork, which results in about 5 ms fast response time. The normalized noise equivalent absorption coefficients (NNEAs) of the top and bottom channels are 7.8*10-9 cm-1W/√Hz and 8.1*10-9 cm-1W/√Hz, respectively. Moreover, the double AmRs provide two independent detection channels that allow optical signal addition or cancellation from different optical wavelengths and facilitate rapid multigas sensing measurements.

Key words: quartz tuning fork, photoacoustic spectroscopy, double acoustic microresonator, fast response time, gas sensor

中图分类号:

武红鹏,董磊,郑华丹,刘研研,刘小利,尹旭坤,马维光,张雷,尹王保,贾锁堂. 双通道石英增强光声光谱测声器的设计及实验研究[J]. 大气与环境光学学报, 2016, 11(1): 37-43.

WU Hongpeng,DONG Lei,ZHENG Huadan,LIU Yanyan,LIU Xiaoli,YIN Xukun,MA Weiguang,. Design and Experimental Research on Two Channel Quartz-Enhanced Photoacoustic Spectroscopy Spectrophone[J]. Journal of Atmospheric and Environmental Optics, 2016, 11(1): 37-43.

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