基于中红外DFB-ICL的氨气传感器设计

大气与环境光学学报 ›› 2017, Vol. 12 ›› Issue (6): 411-419.

基于中红外DFB-ICL的氨气传感器设计

杨旭1，刘霖1，李金义2，杜振辉1,*，张哲远1

（1 天津大学精密测试技术及仪器国家重点实验室，天津 300072；
2 天津工业大学天津市电工电能新技术重点实验室，天津 300387）

收稿日期:2016-09-01 修回日期:2016-10-10 出版日期:2017-11-28 发布日期:2017-11-13
通讯作者: 杜振辉 (1967-), 河北衡水人，博士, 副教授, 硕士生导师, 主要从事光学测试技术、微弱信号检测与处理、嵌入式系统设计等方面的研究。 E-mail:duzhenhui@tju.edu.cn
作者简介:杨旭(1992-)，黑龙江人，男, 硕士研究生，主要从事光学测试技术、环境监测技术与仪器的设计等方面的研究。
基金资助:
Supported by Special-Funded Program on National Key Scientific Instruments and Equipment Development of China(国家重大科学仪器设备开发专项, 2012YQ06016501）

Mid-Infrared DFB-ICLs Based Sensor Design for Odorous Ammonia Monitoring

YANG Xu 1, LIU Lin 1, LI Jinyi 2, DU Zhenhui 1*, ZHANG Zheyuan 1

(1 State Key Laboratory of Precision Measuring Technology and Instruments, Tianjin University, Tianjin 300072, China;
2 Key Laboratory of Advanced Electrical Engineering and Energy Technology, Tianjin Polytechnic University, Tianjin 300387, China)

Received:2016-09-01 Revised:2016-10-10 Published:2017-11-28 Online:2017-11-13
Supported by:
Supported by Special-Funded Program on National Key Scientific Instruments and Equipment Development of China(国家重大科学仪器设备开发专项, 2012YQ06016501）

摘要/Abstract

摘要：

氨气是主要恶臭物质之一，为了实现工业环境污染源中氨气排放的连续监测，研制了中红外激光气体传感器，与传统近红外氨气传感器受干扰气体影响较大不同的是，该传感器采用中红外分布反馈结构的带间级联激光器(distributed feedback inter-band cascade laser, DFB-ICL)为光源，工作波长在3 μm附近，避免了水和CO2干扰气体的影响，同时以空芯光波导（芯径1 mm、长度5 m）做气体池，采用自制多通道数字锁相放大器，同时解调1f和2f谐波信号，实现免校准测量，获得了传感器的梯度实验结果，线性度高达0.99917，不确定度高达0.9%。Allan方差评价结果显示其稳定性非常出色，在最佳积分时间167 s时，本传感器的检测限低至9.7 ppb。

关键词: 分布反馈级间级联激光器, 空心光波导, 氨气检测, 可调谐激光吸收光谱, 波长调制光谱

Abstract:

Ammonia is one of the main odors. A mid-infrared laser based gas sensor was developed for continuous monitoring of the ammonia in pollution emissions in the industrial environment. Different from the traditional near-infrared ammonia sensor, a mid–infrared distributed feedback inter-band cascade laser (DFB-ICL) was used as light source, tuned at the center of 3 μm, which could qualify the sensor to avoid from the interference of water vapor as well as carbon dioxide. A hollow silica waveguide was used for gas cell, and the core diameter is 1mm, the length is 5 m. A home-made multi-channel digital lock-in amplifier was adopted to demodulate 1f/2f harmonics simultaneously so as to realize calibration-free measurement. Concentration gradient results show that this sensor has a linearity as high as 0.99917 as well as an uncertainty of 0.9%. Based on the Allan variance method, it can be clearly seen that the sensor shows a quite excellent stability performance with a detection limit as low as 9.7 ppb at the optimum integration time of 167 s.

Key words: distributed feedback inter-band cascade laser, hollow silica waveguide, ammonia detection, tunable laser absorption spectroscopy, wavelength modulation spectroscopy

中图分类号:

TP212

杨旭刘霖李金义杜振辉张哲远. 基于中红外DFB-ICL的氨气传感器设计[J]. 大气与环境光学学报, 2017, 12(6): 411-419.

YANG Xu, LIU Lin, LI Jin-Xi, DU Zhen-Hui, ZHANG Zhe-Yuan. Mid-Infrared DFB-ICLs Based Sensor Design for Odorous Ammonia Monitoring[J]. Journal of Atmospheric and Environmental Optics, 2017, 12(6): 411-419.

参考文献

[1] National Environmental Protection Agency. Emission standards for odor pollutants: GB14554-93 [S]. Beijing: Standards Press of China, 1993-08-06(in Chinese).
国家环境保护局. 恶臭污染物排放标准: GB14554-93 [S]. 北京: 中国标准出版社, 1993-08-06.
[2] Ye Daiqi. Treatment of nitrogen oxides in flue gas [J]. Environmental Protection Science, 1999, 26(4): 1-4(in Chinese).
叶代启. 烟气中氮氧化物污染的治理 [J]. 环境保护科学, 1999, 26(4): 1-4.
[3] Mount G H, Rumburg B, Havig J, et al. Measurement of atmospheric ammonia at a dairy using differential optical absorption spectroscopy in the mid-ultraviolet [J]. Atmos. Environ., 2002, 36(11): 1799-1810.
[4] Owen K, Farooq A. A calibration-free ammonia breath sensor using a quantum cascade laser with WMS 2f/1f [J]. Appl. Phys. B-Lasers O., 2014, 116(2): 371-383.
[5] Du Zhenhui, Zhai Yaqiong, Li Jinyi, et al. Technolodies of online monitoring volatile organic compounds in ambient air with optical spectroscopy [J]. Spectroscopy and Spectral Analysis, 2009, 29(12): 3199-3203(in Chinese).
杜振辉, 翟雅琼, 李金义, 等. 空气中挥发性有机物的光谱学在线监测技术 [J]. 光谱学与光谱分析, 2009, 29(12): 3199-3203.
[6] Hodgkinson J, Tatam R P. Optical gas sensing: a review [J]. Meas. Sci. Technol., 2012, 24(1): 111-123.
[7] Dong Fengzhong, Kan Ruifeng, Liu Wenqing, et al. Tunable diode laser absorption spectroscopic technology and its applications in air quality monitoring [J]. Chinese Journal of Quantum Electronics, 2005, 22(3): 315-325(in Chinese).
董凤忠, 阚瑞峰, 刘文清, 等. 可调谐二极管激光吸收光谱技术及其在大气质量监测中的应用 [J]. 量子电子学报, 2005, 22(3): 315-325.
[8] Tournie E, Baranov A N. Mid infrared semiconductor lasers: a review [J]. Advances in Semiconductor Lasers, 2012, 86: 183-226.
[9] Nähle L, Fuchs P, Fischer M, et al. Mid infrared interband cascade lasers for sensing applications [J]. Appl. Phys. B-Lasers O., 2010, 100(2): 275-278.
[10] Zhang Zheyuan, Du Zhenhui, Li Jinyi, et al. The development of ammonia sensor based on tunable diode laser absorption spectroscopy with hollow waveguide [J]. Spectroscopy and Spectral Analysis, 2016, 36(8): 2669-2673(in Chinese).
张哲远, 杜振辉, 李金义, 等. 基于空心光波导的可调谐激光吸收光谱氨气传感器设计[J]. 光谱学与光谱分析, 2016, 36(8): 2669-2673.
[11] Webber M E, Claps R, Englich F V, et al. Measurements of NH3 and CO2 with distributed-feedback diode lasers near 2.0 m in bioreactor vent gases [J]. Appl. Opt., 2001, 40(24): 4395-4403.
[12] Rieker G B, Jeffries J B, Hanson R K. Calibration-free wavelength-modulation spectroscopy for measurements of gas temperature and concentration in harsh environments [J]. Appl. Opt., 2009, 48(29): 5546-5560.
[13] Liger V V. Optical fringes reduction in ultrasensitive diode laser absorption spectroscopy [J]. Spectrochim. Acta A, 1999, 55(10): 2021-2026.