Investigation of Diffraction Method for Slit Width Measurement

Journal of Atmospheric and Environmental Optics ›› 2010, Vol. 5 ›› Issue (5): 380-389.

• 论文 • Previous Articles Next Articles

Investigation of Diffraction Method for Slit Width Measurement

HE Bo, ZHENG Xiao-bing, LI Xin, QI Tao, ZOU Peng

（Key Laboratory of General Optical Calibration and Characterization, Anhui Institute of Optics and Fine Mechanics, Chinese Academy of Sciences ，Hefei 230031, China)

Received:2010-04-08 Revised:2010-05-04 Online:2010-09-28 Published:2010-09-14

Abstract

Abstract:

A diffraction-based opto-electronic system is developed for precise measurement of entrance slit width of solar irradiance radiometer. The system uses laser as light source, a NMOS linear array as opto-electronic sensor, a mixed-signal MCU C8051F as host controller, a CPLD as timing generator and on-chip 12-bit ADC. In addition, to achieve high-precision measurement, it uses least-squares method fitting the measured data to extract strip center location. Slit width can be measured within the range from 0.02 mm to 0.5 mm，in the measurement of entrance width of solar irradiance radiometer whose nominal width is 0.1 mm , the total uncertainty is 2.5× 10-3 µm.

Key words: slit width measurement, NMOS linear image senor, opto-electronic system, least-square

CLC Number:

TN247

HE Bo, ZHENG Xiao-Bing, LI Xin, QI Tao, ZOU Peng. Investigation of Diffraction Method for Slit Width Measurement[J]. Journal of Atmospheric and Environmental Optics, 2010, 5(5): 380-389.

References

[1] Harder J W, Fontenla J, Lawerance G, et al. The spectral irradiance monitor: measurement equations and calibration [J]. Solar Physics, 2005, 230(1-2):169-204.
[2] Yao Qijun. Optics [M]. Beijing: Higher Education Press,1989: 113-123(in Chinese).
姚启钧. 光学教程 [M]. 北京: 高等教育出版社, 1989: 113-123.
[3] Li Jiangfan, Shan Shumin, Huang Chunjia, et al. Fraunhofer approximation and measurement correctnessby Fraunhofer diffraction [J]. Optical Technique, 2001, 127(15): 472-480(in Chinese).
厉江帆, 单树民，黄春佳, 等. 夫朗和费近似与夫朗和费衍射测量的准确度 [J]. 光学技术, 2001, 127(15): 472-480.
[4] Ma Fuzhou. On-line precision measurement of the diameter of thin thread using CCD diffraction imaging [J]. Journal of Xi'an University Science & Technology, 2001, 21(1): 70-77(in Chinese).
马附洲. CCD 衍射成象在线精密测量细丝直径技术 [J]. 西安科技学院学报, 2001, 21(1): 70-77.
[5] Zhu Jigui, Ye Shenghua, Tao Guozhi. Precision measurement of the diameter of thin thread by using diffraction method [J]. Opto-Electronic Engineering, 1996, 23(3): 59-63(in Chinese).
邾继贵, 叶声华, 陶国智. 衍射法细丝直径的精密测量 [J]. 光电工程, 1996, 23(3): 59-63.
[6]Wang Qingyou. CCD Applications [M]. Tianjin: Tianjin University Press,2002: 15(in Chinese).
王庆有. CCD 应用技术 [M]. 天津: 天津大学出版社, 2000: 15.
[7]Liu Jixing,Yan Feilong, Chen Zhaoyan. Design of the time sequence driving circuit for CCD based on CPLD [J]. Instrµmentation Customer, 2006, (3): 111-112(in Chinese).
刘计星, 严飞龙, 陈昭炎. 基于CPLD的CCD驱动时序电路的设计 [J]. 仪器仪表用户, 2006, (3): 111-112.
[8] Altera Corporation. MAX II Device Handbook [M/OL]. 2004, http://www.altera.com.cn/literature/br/br_max2.pdf.
[9]Xin Chunyan. VHDL Hardware Description Language [M]. Beijing: National Defence Industry Press, 2002(in Chinese).
辛春艳. VHDL 硬件描述语言 [M]. 北京: 国防工业出版社，2002.
[10] Silicon Laboratories Inc.. C8051F02x Data Sheet [Z/OL]. http://www.silabs.com/Support Documents/TechnicalDocs/C8051F02x.pdf.
[11] Zhang Fengsheng, Xu Zhiliang. Method of data processing for improving the accuracy of measuring the dark stripe interval of thin wire diffraction pattern [J]. Measurement Technique, 2000, (7): 30-33(in Chinese).
张凤生, 徐志良. 提高细丝衍射图样暗纹间距测量准确度的数据处理方法 [J]. 计量技术,　2000, (7): 31-33.

Investigation of Diffraction Method for Slit Width Measurement

Knowledge

Abstract

Cite this article

share this article

References

Related Articles 2

Recommended Articles

Metrics

Comments

[1]	XU Zhen-Yu, LIU Wen-Qing, KAN Rui-Feng, ZHANG Yu-Jun, ZHANG Shuai, SHU Xiao-Wen, HE Ying, ZHANG Liang, TANG Yuan-Yuan. Atmospheric Water Vapor Concentration Measurement Method Based on Tunable Diode Laser Absorption Spectroscopy [J]. Journal of Atmospheric and Environmental Optics, 2011, 6(2): 95-.
[2]	FANG Fang, HU Zhen-Hua, GU Xue-Jun, FANG Li. Wavelength Misalignment in the Retrieval of Atmospheric Trace Gases Concentration [J]. Journal of Atmospheric and Environmental Optics, 2010, 5(1): 40-45.